Standard Guide for
Performing Sputter Crater Depth Measurements1
This standard is issued under the fixed designation E 1634; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
click below Astm E 1634 – 02 pdf free download
click here Astm E 1633 – 02a pdf free download